| 摘要 |
The present invention relates to a vacuum gate valve which maintains the vacuum state of the vacuum gate valve conjunctly by simultaneously opening and closing gates which are respectively formed in the front and rear sides of the vacuum gate valve with a pair of gate plates. For the forementioned, the vacuum gate valve of the present invention includes: a valve body in which first and second gates are formed; a valve plate assembly which is equipped with first and second gate plates opening and closing the first and second gates, a base installed in a lower part between the first and second gate plates, a pair of support plates installed between the first and second gate plates and respectively moving back and forth, a left-and-right movement device part moving each support plate in the left and right directions, a back-and-forth movement device part moving the first and second gate plates back and forth, and multiple link members moving the first and second gate plates in the front and rear directions; and an up-and-down movement device part which is equipped with a movement cylinder and a cylinder road which moves in the up and down directions by being combined with the movement cylinder in order to move the valve plate assembly in the up and down directions. |
