SYNTHESIS OF SIC FROM MICROWAVE-DRIED SILICON SLUDGE AND APPLICATION OF MICROWAVE-DRIED SILICON SLUDGE

摘要

The present invention relates to a synthesis method for silicon carbide powders from silicon sludge. The present invention provides the synthesis method for silicon carbide from sludge generated when a silicon wafer is cut off comprising: a step of providing silicone sludge including silicone and silicon carbide; a step of centrifuging the solid content of the silicone sludge; a drying step of removing oil by heating the centrifuged silicon sludge with microwave in the inert atmosphere of a microwave chamber; and a step of making the mixture react and sintering the mixture. The present invention is able to manufacture sintered silicon carbide at low synthesis temperatures from silicon sludge. [Reference numerals] (116) O2 sensor; (120) Controller