| 发明名称 |
METHOD AND SYSTEM FOR CONVERGENT POLISHING |
| 摘要 |
<p>A polishing system for polishing an optical element includes a polishing pad having a radial dimension and a septum disposed on the polishing pad. The septum is configured to partially surround the optical element. The optical element contacts the polishing pad over a range of the radial dimension and a pad wear rate of the polishing pad is substantially constant as a function of radial dimension over the range of the radial dimension.</p> |
| 申请公布号 |
KR20140019392(A) |
申请公布日期 |
2014.02.14 |
| 申请号 |
KR20137027590 |
申请日期 |
2012.03.20 |
| 申请人 |
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC |
发明人 |
SURATWALA TAYYAB I.;STEELE WILLIAM A.;FEIT MICHAEL D.;DESJARDIN RICHARD P.;MASON DANIEL C.;DYLLA SPEARS REBECCA J.;WONG LANA L.;MILLER PHILIP E.;GERAGHTY PAUL;BUDE JEFFREY D. |
| 分类号 |
B24B7/20;B24B7/04;B24B13/00 |
主分类号 |
B24B7/20 |
| 代理机构 |
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