发明名称 |
PROCEDE DE FABRICATION D'UN EMPILEMENT MOS SUR UN SUBSTRAT EN DIAMANT |
摘要 |
<p>The invention relates to a method for producing a component comprising a conductive grid insulated from a semiconductor monocrystalline diamond substrate by an insulating region, comprising the following steps: a) oxygenating the surface of the substrate so as to replace the hydrogen surface terminations of the substrate with oxygen surface terminations; and b) forming the insulating region on the surface of the substrate by repeated monatomic layer deposition.</p> |
申请公布号 |
FR2984595(B1) |
申请公布日期 |
2014.02.14 |
申请号 |
FR20110062052 |
申请日期 |
2011.12.20 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;UNIVERSITE JOSEPH FOURIER |
发明人 |
CHICOT GAUTHIER;MARECHAL AURELIEN;MURET PIERRE;PERNOT JULIEN |
分类号 |
H01L21/334 |
主分类号 |
H01L21/334 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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