发明名称 CHAMBER SYSTEM OF TEST HANDLER AND CARRIER BOARD CIRCULATING METHOD IN TEST HANDLER
摘要 PURPOSE: A chamber system of a test handler and a carrier board circulating method in a test handler are provided to prevent interference between a carrier board circulating in a test handler and other devices. CONSTITUTION: A soak chamber(110) and a desoak chamber(130) changes temperatures of electronic parts loaded on a carrier board into a required temperature or almost room temperature. A supply chamber(140) is horizontally placed in rear parts of the soak chamber and the desoak chamber. A test chamber(120) is placed in a rear part of the supply chamber and electrically connects electronic parts loaded on the carrier board supplied from the supply chamber to a tester.
申请公布号 KR101361492(B1) 申请公布日期 2014.02.14
申请号 KR20090084200 申请日期 2009.09.07
申请人 发明人
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
代理机构 代理人
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