发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE FILM, AND METHOD FOR FORMATION OF PATTERN
摘要 Disclosed is a photosensitive resin composition which can form a highly precise pattern, has excellent thermal degradability of an organic component, and shows less shrinking after firing. The composition comprises an alkali-soluble resin (A) having at least one SH group, a polyfunctional (meth)acrylate (B), a photopolymerization initiator (C) and an inorganic particle (D). Also disclosed is a method for forming a pattern by using the composition.
申请公布号 KR101363126(B1) 申请公布日期 2014.02.13
申请号 KR20097005618 申请日期 2007.08.21
申请人 发明人
分类号 G03F7/027;G03F7/028;G03F7/029;H01J17/49 主分类号 G03F7/027
代理机构 代理人
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