发明名称 COMPOSITE OXIDE SINTERED BODY AND TRANSPARENT CONDUCTIVE OXIDE FILM
摘要 Provided are: a composite oxide sintered body which is capable of providing a transparent conductive oxide film that exhibits low light absorption characteristics over a wide wavelength range and has low resistance; and a transparent conductive oxide film. A composite oxide sintered body containing indium, zirconium, hafnium and oxygen, which is characterized in that the atomic ratio of the elements constituting the sintered body satisfies the following formulae, where In, Zr and Hf respectively represent the contents of indium, zirconium and hafnium. Zr/(In + Zr + Hf) = 0.05-4.5 at% Hf/(In + Zr + Hf) = 0.0002-0.15 at%
申请公布号 WO2014024986(A1) 申请公布日期 2014.02.13
申请号 WO2013JP71541 申请日期 2013.08.08
申请人 TOSOH CORPORATION 发明人 KURAMOCHI, HIDETO;TAMANO, KIMIAKI;AKIIKE, RYO;IIGUSA, HITOSHI
分类号 C23C14/34;C04B35/00 主分类号 C23C14/34
代理机构 代理人
主权项
地址