| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming device that can be made small and that can form a film with a simple structure and at low costs.SOLUTION: A chamber 11 is provided with a pressure-resistant chamber body 11a capable of keeping the inside under an airtight state. Three regions, a first film forming section E1 having a first cathode 21, a second film forming section E2 having a second cathode 31, and a carrier rotation section E3 arranged between the first film forming section E1 and the second film forming section E2 are formed inside the chamber body 11a. The first film forming section E1, the second film forming section E2, and the carrier rotation section E3 are arranged in a single chamber body 11a without partitions such as a valve. The three regions E1-E3 are uniformly decompressed by a first vacuum pump 22 for decompressing the entire inside of the chamber 11. |
