UNIVERSAL FIXTURE FOR MACHINING A FLAT SUBSTRATE

摘要

A fixture apparatus (10) for mounting a flat workpiece (12) to a worktable (14) has at least first and second separately positioned vacuum mount elements (20a-20b), wherein each vacuum mount element has a base (22) having a lower contact surface (24) for seating against the worktable and having a clamping surface (28) spaced apart from the lower contact surface. There is a raised portion (26) that extends orthogonal to the lower contact surface and that has an upper contact surface that is parallel to the lower contact surface for positioning against the flat workpiece, wherein a height dimension between the lower and upper contact surfaces is uniform to within +/- 0.02 mm. A vacuum chamber (40) hollowed out within the raised portion is in fluid communication with a vacuum port for providing vacuum force through the vacuum chamber to secure the workpiece against the upper contact surface.