发明名称 APPARATUS AND METHOD FOR MANUFACTURING PHASE-TYPE DIFFRACTION ELEMENT USING LASER EXPOSURE TYPE
摘要 The present invention relates to an apparatus for manufacturing a phase-type diffraction element using a direct laser exposure method, a method of manufacturing a phase-type diffraction element, and a phase-type diffraction element using a direct laser exposure method. More specifically, the present invention relates to an apparatus and method for manufacturing a phase-type diffraction element by radiating a laser beam on a substrate formed of photo-curable resin.
申请公布号 WO2014025149(A1) 申请公布日期 2014.02.13
申请号 WO2013KR06711 申请日期 2013.07.26
申请人 KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE 发明人 RHEE, HYUG-GYO;YANG, HO SOON;GHIM, YOUNG SIK;LEE, YUN WOO
分类号 G02B5/18;G03F7/26 主分类号 G02B5/18
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