发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING PHASE-TYPE DIFFRACTION ELEMENT USING LASER EXPOSURE TYPE |
摘要 |
The present invention relates to an apparatus for manufacturing a phase-type diffraction element using a direct laser exposure method, a method of manufacturing a phase-type diffraction element, and a phase-type diffraction element using a direct laser exposure method. More specifically, the present invention relates to an apparatus and method for manufacturing a phase-type diffraction element by radiating a laser beam on a substrate formed of photo-curable resin. |
申请公布号 |
WO2014025149(A1) |
申请公布日期 |
2014.02.13 |
申请号 |
WO2013KR06711 |
申请日期 |
2013.07.26 |
申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
RHEE, HYUG-GYO;YANG, HO SOON;GHIM, YOUNG SIK;LEE, YUN WOO |
分类号 |
G02B5/18;G03F7/26 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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