发明名称 MIDDLE-OF-THE-LINE CONSTRUCTS USING DIFFUSION CONTACT STRUCTURES
摘要 An approach for providing MOL constructs using diffusion contact structures is disclosed. Embodiments include: providing a first diffusion region in a substrate; providing, via a first lithography process, a first diffusion contact structure; providing, via a second lithography process, a second diffusion contact structure; and coupling the first diffusion contact structure to the first diffusion region and the second diffusion contact structure. Embodiments include: providing a second diffusion region in the substrate; providing a diffusion gap region between the first and second diffusion regions; providing the diffusion contact structure over the diffusion gap region; and coupling, via the diffusion contact structure, the first and second diffusion regions.
申请公布号 US2014042641(A1) 申请公布日期 2014.02.13
申请号 US201213568737 申请日期 2012.08.07
申请人 RASHED MAHBUB;MA YUANSHENG;LIN IRENE;STEPHENS JASON;DENG YUNFEI;LEI YUAN;KYE JONGWOOK;AUGUR ROD;AHMED SHIBLY;KENGERI SUBRAMANI;VENKATESAN SURESH;GLOBALFOUNDRIES INC. 发明人 RASHED MAHBUB;MA YUANSHENG;LIN IRENE;STEPHENS JASON;DENG YUNFEI;LEI YUAN;KYE JONGWOOK;AUGUR ROD;AHMED SHIBLY;KENGERI SUBRAMANI;VENKATESAN SURESH
分类号 H01L21/768;H01L23/48 主分类号 H01L21/768
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