发明名称 PHOTOSENSITIVE ORGANIC PARTICLES
摘要 A material forms a pattern by applying a photosensitive composition to a base material and drying to form a photosensitive coating and performing exposure and development, and a method for forming the pattern. A photosensitive composition includes water-soluble organic particles, and a solvent, wherein the solvent is a poor solvent for the water-soluble organic particles. Preferably, the water-soluble organic particles of the photosensitive composition includes a polymer which contains a unit structure (A) for forming organic particles, a unit structure (B) for forming interparticle crosslinkage, and a unit structure (C) for imparting dispersibility, and the photosensitive composition further includes a photoacid generator. In addition, the water-soluble organic particles of the photosensitive composition includes a polymer which contains the unit structure (A) for forming organic particles, the unit structure (B) for forming interparticle crosslinkage, the unit structure (C) for imparting dispersibility, and a unit structure (D) having a photoacid generating group.
申请公布号 US2014045119(A1) 申请公布日期 2014.02.13
申请号 US201214111021 申请日期 2012.04.11
申请人 KISHIOKA TAKAHIRO;UMEZAKI MAKIKO;KIMURA SHIGEO;NISHIMAKI HIROKAZU;OHASHI TOMOYA;USUI YUKI;NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 KISHIOKA TAKAHIRO;UMEZAKI MAKIKO;KIMURA SHIGEO;NISHIMAKI HIROKAZU;OHASHI TOMOYA;USUI YUKI
分类号 G03F7/004;G03F7/20 主分类号 G03F7/004
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