发明名称 |
MICROPLASMA GENERATION DEVICES AND ASSOCIATED SYSTEMS AND METHODS |
摘要 |
Microplasma generators and associated arrays and methods are described herein. Certain embodiments relate to a microplasma generator in which an elongated semiconductor structure can control electronic current supplied to a microplasma cavity. |
申请公布号 |
WO2014026001(A2) |
申请公布日期 |
2014.02.13 |
申请号 |
WO2013US54138 |
申请日期 |
2013.08.08 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
VELASQUEZ-GARCIA, LUIS, FERNANDO |
分类号 |
H01J17/50 |
主分类号 |
H01J17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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