发明名称
摘要 <p>The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma coating processes, wherein the following method steps are carried out: a. providing a cassette (1) which can be assembled and disassembled using a disassembly and assembly robot, b. automatic disassembling of the cassette such that the bottoms (2) of the cassette are separated from one another, c. transferring and associating the bottoms (2) to at least one automatic feeding apparatus which populates the bottoms (2) with workpieces to be processed, d. mounting the populated bottoms (2) to the cassette (1), e. transferring the cassette (1) to the process site where the process should be executed, f. executing the process, g. transferring the cassette (1) to the disassembly and assembly robot or to a further disassembly and assembly robot, h. disassembling the cassette in such a way that the bottoms (2) of the cassette are separated from one another, and i. automatic removal of the workpieces being processed.</p>
申请公布号 JP2014503989(A) 申请公布日期 2014.02.13
申请号 JP20130538066 申请日期 2011.11.11
申请人 发明人
分类号 H01L21/673;C23C16/458 主分类号 H01L21/673
代理机构 代理人
主权项
地址