发明名称 |
DOUBLE CONTACTS FOR CARBON NANOTUBES THIN FILM DEVICES |
摘要 |
A method of fabricating a semiconductor device is disclosed. A first contact layer of the semiconductor device is fabricated. An electrical connection is formed between a carbon nanotube and the first contact layer by electrically coupling of the carbon nanotube and a second contact layer. The first contact layer and second contact layer may be electrically coupled. |
申请公布号 |
US2014042392(A1) |
申请公布日期 |
2014.02.13 |
申请号 |
US201213585465 |
申请日期 |
2012.08.14 |
申请人 |
CAO QING;FRANKLIN AARON D.;SMITH JOSHUA T.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CAO QING;FRANKLIN AARON D.;SMITH JOSHUA T. |
分类号 |
H01L29/775;B82Y99/00 |
主分类号 |
H01L29/775 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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