发明名称 METHOD FOR PRODUCING POLYMER COMPOUND, POLYMER COMPOUND, AND PHOTORESIST RESIN COMPOSITION
摘要 Provided are a method for producing a polymer compound that has a very low content of impurities such as metal components and has excellent preservation stability, a polymer compound obtained by this production method, and a photoresist resin composition containing the polymer compound. This method for producing a polymer compound comprises a step for using a filter that contains no strongly acidic cation exchange groups and exhibits a positive zeta potential to filter a resin solution containing a polymer compound having at least one species of monomer unit (a) selected from monomer units represented by formulae (a1) to (a3), and a monomer unit (b) comprising a group that is partially eliminated by acid to become alkali-soluble.
申请公布号 WO2014024702(A1) 申请公布日期 2014.02.13
申请号 WO2013JP70289 申请日期 2013.07.26
申请人 DAICEL CORPORATION 发明人 EGUCHI, AKIRA;NISHIMURA, MASAMICHI
分类号 C08F6/06;C08F220/10;G03F7/039 主分类号 C08F6/06
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