发明名称 |
METHOD FOR PRODUCING POLYMER COMPOUND, POLYMER COMPOUND, AND PHOTORESIST RESIN COMPOSITION |
摘要 |
Provided are a method for producing a polymer compound that has a very low content of impurities such as metal components and has excellent preservation stability, a polymer compound obtained by this production method, and a photoresist resin composition containing the polymer compound. This method for producing a polymer compound comprises a step for using a filter that contains no strongly acidic cation exchange groups and exhibits a positive zeta potential to filter a resin solution containing a polymer compound having at least one species of monomer unit (a) selected from monomer units represented by formulae (a1) to (a3), and a monomer unit (b) comprising a group that is partially eliminated by acid to become alkali-soluble. |
申请公布号 |
WO2014024702(A1) |
申请公布日期 |
2014.02.13 |
申请号 |
WO2013JP70289 |
申请日期 |
2013.07.26 |
申请人 |
DAICEL CORPORATION |
发明人 |
EGUCHI, AKIRA;NISHIMURA, MASAMICHI |
分类号 |
C08F6/06;C08F220/10;G03F7/039 |
主分类号 |
C08F6/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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