发明名称 |
INVERTED CYLINDRICAL MAGNETRON (ICM) SYSTEM AND METHODS OF USE |
摘要 |
An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field. |
申请公布号 |
WO2014025995(A1) |
申请公布日期 |
2014.02.13 |
申请号 |
WO2013US54130 |
申请日期 |
2013.08.08 |
申请人 |
PALMAZ SCIENTIFIC, INC. |
发明人 |
XU, TIANZONG;GUO, GEORGE, XINSHENG;NGUYEN, OAHN |
分类号 |
C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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