| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing method capable of obtaining stored energy from each rectangle after being divided into patterns with fast processing, or calculation, speed and with high accuracy.SOLUTION: Regarding a method for calculating stored energy from each rectangle derived by dividing a pattern drawn on a sample, the method being used to obtain the optimum irradiation amount of an electron beam having its proximity effects corrected, the prevent invention is adapted to obtain a discrete function map composed of energy distribution of each of a plurality of elements in advance and then obtain stored energy from each rectangle according to the function map. Since only a simple calculation needs to be made according to a previously obtained map, or the energy distribution of each element, this method makes it possible to obtain stored energy from each rectangle at a discretionary point quickly without taking much time. Also, even when grid intervals of each individual element are narrowly set, stored energy can be highly accurately obtained from rectangles in a short time. |
