发明名称 REFRIGERANT GAS INJECTION TUBE HAVING DOUBLE-TUBE STRUCTURE, AND HANDLER WITH THE SAME
摘要 Disclosed is a refrigerant gas injection tube having a double-tube structure for a handler. The injection tube includes a dry air tube injecting/discharging dry air; a refrigerant gas tube having an external diameter which is smaller than the inner diameter of the dry air tube and arranged in the dry air tube; and a refrigerant gas injection hole penetrating the dry air tube and the refrigerant gas tube. The refrigerant gas injection hole may be formed to spray the refrigerant gas injected to the refrigerant gas injection tube to the outside of the dry air tube without spraying the refrigerant gas into the dry air tube.
申请公布号 KR101360159(B1) 申请公布日期 2014.02.13
申请号 KR20120091279 申请日期 2012.08.21
申请人 HER, KYONG SAM 发明人 KWON, OH SEOK
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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