| 摘要 |
In one embodiment of the present invention, disclosed is a drying apparatus which includes a station for drying a substrate and a transfer unit which transfers the substrate from the station in a transfer direction. The transfer unit includes a stage which includes a pocket part which is composed of pins which are fixed on the stage and support the substrate, and a shuttle which receives the substrate loaded on the pocket part, loads the substrate on another pocket part which is adjacent in the transfer direction, and includes a receiving unit which is composed of the pins. [Reference numerals] (AA) First station; (BB) Second station; (CC) Third station |
