| 摘要 |
An apparatus and method for optically inspecting an object, comprising an object carrier for carrying the object, a pattern generating unit for illuminating the object with a measurement pattern, an image capture unit for capturing a number of images of the object, imaging optics for influencing a light beam path between the object and the image capture unit, and a data processing unit for determining at least one property of the object on the basis of the captured images. The apparatus can be set to at least a first operating distance and a second operating distance, and furthermore has a diffusing unit, which can be changed between an active state, in which the diffusing unit influences the light beam path in front of the pattern generating unit and an inactive state, in which the diffusing unit does not influence the light beam path in front of the pattern generating unit. |
