| 摘要 |
An apparatus for inspecting a measurement object, comprising a workpiece support for supporting the measurement object, and a measuring head carrying an optical sensor. The measuring head and the workpiece support are movable relative to one another. The optical sensor has an objective and a camera for capturing an image of the measurement object along an imaging beam path. The objective has a light entrance opening and a light exit opening, a diaphragm and a multitude of lens-element groups arranged in the objective between the light entrance opening and the light exit opening along a longitudinal axis of the objective. At least two lens-element groups are displaceable parallel to the longitudinal axis. The apparatus also has an illumination device for illuminating the measurement object along an illumination beam path, and a chromatic assembly that can selectively be introduced into the illumination beam path and/or the imaging beam path. |
