ULTRA-HIGH PURITY STORAGE AND DISPENSING OF LIQUID REAGENTS
摘要
A supply vessel for dispensing of ultra-high purity chemical reagents, comprising a metal container defining an enclosable interior volume including interior surface structure, wherein the interior surface structure is coated with an ultra-high purity effective polyperfluoroalkoxyethylene coating. Such supply vessel may for example be utilized for storage and dispensing of ultra-high purity chemical reagent to a semiconductor manufacturing tool, or a tool for manufacturing of flat-panel displays, or solar panels.
申请公布号
WO2014025937(A1)
申请公布日期
2014.02.13
申请号
WO2013US54025
申请日期
2013.08.07
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
NAITO, DONN, K.;KRELL, ANDY;MCFERON, MITCHELL, W.;JACKSON, STEVEN;ROBISON, JOEL