| 摘要 |
PIN LIFTING SYSTEMAn aspect of the present invention is drawn to a device for use with an electrostatic chuckhaving a top surface and a bottom surface, the top surface being separated from the bottomsurface by a width, the electrostatic chuck additionally having a hole therein, the hole having afirst width at the top surface and having a second width at the bottom surface, the first widthbeing less than the second width, the top surface being capable of having wafer disposedthereon. The device includes a pin, a shaft, a neck portion and an outer housing portion. The pinhas a pin width less than the first width. The shaft has a pin-holding portion, an end portion anda central portion disposed between the pin-holding portion and the end portion. The centralportion has a first bearing portion. The outer housing portion has a first end and a second endand includes a second bearing portion. The shaft is disposed within the outer housing portionand is moveable relative to the outer housing portion. The neck portion is disposed at the firstend. The second bearing portion is stationary relative to the neck portion. The first bearingportion is movable relative to the second bearing portion. PIN LIFTING SYSTEM An aspect of the present invention is drawn toa device for use with an electrostatic chuck having a top surface and abottom surface, the top surface being separated from the bottom surface bya width, the electrostatic chuck additionally having a hole therein, thehole having a first width at the top surface and having a second width atthe bottom surface, the first width being less than the second width, thetop surface being capable of having wafer disposed thereon. The deviceincludes a pin, a shaft, a neck portion and an outer housing portion. Thepin has a pin width less than the first width. The shaft has a pin-holdingportion, an end portion and a central portion disposed between thepin-holding portion and the end portion. The central portion has a firstbearing portion. The outer housing portion has a first end and a second endand includes a second bearing portion. The shaft is disposed within theouter housing portion and is moveable relative to the outer housingportion. The neck portion is disposed at the first end. The second bearingportion is stationary relative to the neck portion. The first bearingportion is movable relative to the second bearing portion. FIGS |
