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发明名称
摘要
A microwave plasma processing apparatus has a microwave antenna in which a wavelength-shortening plate and a cooling portion of a cooling jacket are arranged adjacent to each other.
申请公布号
JP5411136(B2)
申请公布日期
2014.02.12
申请号
JP20100520814
申请日期
2009.06.24
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
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