| 摘要 |
Disclosed is a MEMS variable capacitor including: a first electrode; a second electrode spaced apart from the first electrode; a third electrode floating above the first electrode; and an actuator including a fourth electrode facing the second electrode, a connector connecting the third electrode and the fourth electrode, and a support supporting a portion of the connector, wherein the third electrode and the connector are integrally formed with each other, and wherein a capacitance is changed by applying a voltage to the second electrode and by adjusting a gap between the first electrode and the third electrode. |
