| 摘要 |
<p>The backlash detecting apparatus comprises: a monochromator (20) for Bragg-diffracting the incident beam (N1); an analyzer (40) on which the beam diffracted by the monochromator is incident and which Bragg-diffracts the incident beam; a controller (60) for controlling the driver (50) connected to the monochromator (20) or the analyzer (40), so as to rotate the monochromator (20) or the analyzer (40) in a first direction and in a second direction opposite to the first direction; and a detector (70,80) for detecting the beam diffracted (N2) by the analyzer (40) or transmitted (N3) through the analyzer (40) while the monochromator (20) or the analyzer (40) is rotating and measuring a backlash of the driver (50). The backlash detecting apparatus can measure backlash to sub-arcsecond or sub-nanometer precision by using a radiation beam such as a neutron beam, an X-ray beam or the like.</p> |
