| 摘要 |
A slit nozzle of the present invention comprises: a nozzle main body having an outlet; multiple nozzle assemblies arranged at the nozzle main body in line for discharging a liquid chemical through the outlet; and multiple actuators arranged at the nozzle main body in line for operating the nozzle assemblies individually. Cell units of actuators and nozzle assemblies are arranged in the longitudinal direction at the nozzle main body, and the actuators are selectively operated through an individual control, which can control the width of the outlet coating liquid chemical. Hence, the liquid chemical can be coated on various sizes of substrates. |
