发明名称 METHOD FOR DETECTING CENTER OF PLATE-SHAPED WORK
摘要 The purpose of the present invention is to provide a method for detecting the center of a plate-shaped work, which can detect the center of a plate-shaped work having transparent properties as well as a plate-shaped work having light shielding properties. A work imaging device (1) comprises: a maintaining table (14) having a maintaining surface (14b) which maintains a plate-shaped work (Wt) having transparent properties; an imaging unit (17) which captures an image of the plate-shaped work maintained on the maintaining table from the top; and an imaging light (12) which has a light emitting surface (12a) with a larger area than the plate-shaped work, and emits light to the plate-shaped work from the bottom during imaging by the imaging unit. Light is emitted vertically to the plate-shaped work by securing a fixed distance (D) between the light emitting surface of the imaging light and the maintaining surface of the maintaining table. The height (H) of an imaging camera (17b) is set in order to capture an image of the outer circumference of the plate-shaped work in black and capture an image of the external side of the plate-shaped work in white. [Reference numerals] (17c) Determination unit; (17d) Detection unit
申请公布号 KR20140018116(A) 申请公布日期 2014.02.12
申请号 KR20130088048 申请日期 2013.07.25
申请人 DISCO CORPORATION 发明人 FUKUSHI NOBUYUKI
分类号 H01L21/68;G01B11/00 主分类号 H01L21/68
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