MICROPUMP

摘要

A micropump configured to control flow of an insulation fluid includes: a rectangular channel 370 configured to have a rectangular shape in which a movement passage of the insulation fluid; a planar electrode forming section 310 configured to be formed inside the rectangular channel and have a planar shape for applying an electric field; an inflow section 320 configured such that the insulation fluid flows in; and an outflow section 330 configured such that the insulation fluid flows out. Since an insulation fluid with low conductivity in a range of 10 -10 to 10 -12 S/m is transported with a simple technical structure without using a complicated component, it is possible to obtain the advantage of cost saving and application to various minute dynamics devices.