| 摘要 |
PROBLEM TO BE SOLVED: To provide a fault prediction system and a fault prediction method which can excellently predict a fault of a substrate processing apparatus. SOLUTION: A fault pattern storage table 23b of each substrate processing apparatus is provided for the substrate processing apparatus from a fault pattern server prior to fault prediction. A fault prediction unit 24b of the substrate processing apparatus predicts a fault of each device included in the substrate processing apparatus based upon a parameter history table 23a and a fault pattern storage table 23b of a large-capacity storage unit 23. An update unit 24f of the substrate processing apparatus updates the fault pattern storage table 23b of the large-capacity storage unit 23 based upon a fault pattern update table 21b transmitted from the fault pattern server. An update unit 74a of the fault pattern server updates a fault pattern storage table 73a of a large-capacity storage unit 73 based upon difference data 71a generated by a substrate processing apparatus to which a device fault occurs. COPYRIGHT: (C)2011,JPO&INPIT |
