| 摘要 |
PROBLEM TO BE SOLVED: To measure spherical aberration of an optical system simply in a short time. SOLUTION: An apparatus of measuring displacement includes: a microlens array including first and second microlenses arranged; a light receiving element array having at least three light receiving elements for each of the first and second microlenses for receiving a light flux; a selecting means for selecting the first and second light receiving elements different from each other among the at least three light receiving elements corresponding to the first microlens and also selecting the third and fourth light receiving elements corresponding to the first and second light receiving elements among the at least three light receiving elements corresponding to the second microlens; a measuring means for generating a first signal string by an output obtained by the first light receiving element and an output obtained by the third light receiving element and also generating a second signal string by an output obtained by the second light receiving element and an output obtained by the fourth light receiving element to measure a displacement amount between the first and second signal strings; and a control means for changing a pair of the light receiving elements selected by the selecting means thereby obtaining a plurality of displacement amounts by the measuring means. COPYRIGHT: (C)2010,JPO&INPIT |
