发明名称 FINE CONTROL OF VAPORIZED ORGANIC MATERIAL
摘要 <p>A method for vaporizing organic components and delivering the vapor through opening(s) in a manifold to a substrate surface spaced from the manifold to form a film composed of at least two organic components, comprising: delivering a first quantity of a single first organic component into a vaporization device where the component is vaporized and delivered at a first predetermined rate to the manifold; delivering into a transport apparatus a quantity of a mixture of organic components in a predetermined ratio that includes the first organic component; the transport apparatus delivering the mixture of organic components at a second predetermined rate to a flash heating region wherein the mixture is vaporized and delivered to the manifold; and mixing the organic components in the manifold, which permits the mixed vaporized components to be deposited through the opening(s) onto the substrate surface to form the film.</p>
申请公布号 EP2137335(B1) 申请公布日期 2014.02.12
申请号 EP20080742472 申请日期 2008.04.02
申请人 GLOBAL OLED TECHNOLOGY LLC 发明人 BOROSON, MICHAEL LOUIS
分类号 C23C14/24 主分类号 C23C14/24
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