METHOD AND APPARATUS CAPABLE OF SYNTHESIZING HIGH DENSITY WIRES IN PORES AND ON SURFACE OF POROUS MATERIAL

摘要

The present invention provides a synthesis method for nanowires. The method includes a steps of placing a covering at an interval from a substrate arranged in a reactor for the synthesis of nanowires, a step of heating the reactor, and a step of synthesizing nanowires by depositing source gas on the substrate while passing the source gas between the substrate and the covering. [Reference numerals] (30) Heating element; (AA,CC) Source gas; (BB) Vacuum pump; (DD) Structure of wires extended by controlling a gap between a capsule and a substrate