| 摘要 |
The present invention relates to a pneumatic bearing system simultaneously controlling the amount and pressure of the air to minutely control the air pressure in a device with a pneumatic bearing. The pneumatic bearing system comprises multiple pneumatic tanks with different pressure for pneumatic control; and a control device for controlling the flowing amount of an air flow line for controlling the amount of the air. Moreover, the pneumatic bearing system is characterized by a peripheral part with low pressure to prevent noise generated when the air is leaking. [Reference numerals] (AA) Control device; (BB) Tank1; (CC) Tank2; (DD) Tank3; (EE) Low pressure tank; (FF) Peripheral part; (GG) Atmospheric pressure; (HH) Orifice part; (II) Air pocket |
