| 摘要 |
A displacement sensor and a method for detecting displacement using the same are disclosed. According to an embodiment of the present invention, the displacement sensor comprises: a coupler element which can perform a motion mutually associated with the position of a component; a transmitting coil which is excited by a excitation signal in order to generate electromagnetic radiation; multiple receiving coils which share grounding (GND) and generate individual receiving signals through inductive coupling with the transmitting coil according to the shielding of the electromagnetic radiation by the coupler element; a reference coil which generates a reference signal irrelevant to the position of the coupler element through inductive coupling with the transmitting coil; and a signal processing unit which generates a compensation signal including information on a gap where common mode factors are removed, using the reference signal and multiple receiving signals, and senses the displacement corresponding to the position of the component by considering the gap using the generated compensation signal and the multiple receiving signals. The reference coil generates a reference signal having a signal change amount different from the signal change amount to the addition of the multiple receiving signals according to changes in a gap from the coupler element, in order to compensate for the common mode factors and the gap error at the same time, thereby improving the accuracy in sensing the displacement. [Reference numerals] (AA,CC) Area A; (BB,DD) Area B |
