| 摘要 |
A mask exchange apparatus for a deposition chamber is disclosed. The mask exchange apparatus includes a frame detachably installed on one side of the deposition chamber, an upper portion of the frame being opened on one side thereof, a mask opening being formed in a portion of the other side opposite to one side, and the frame having at least two support columns on a bottom surface thereof and a support plate fixed to lower ends of the support columns; a movable cabinet installed in the frame via a cabinet lifting means so as to move the movable cabinet up and down with respect to the frame, both sides of the movable cabinet opposite to the mask opening being opened, and the movable cabinet having at least two mask loading parts having different height and provided on inner walls of the remaining sides; a mask transferring means, installed on both sides of the frame, for sequentially transferring a mask loaded on the mask loading part to the deposition chamber or transferring the mask from the deposition chamber to its original position, through the mask opening of the frame; and a controller each connected to the cabinet lifting means and the mask transferring means for controlling the operation thereof. |
