发明名称 |
HEATING AND PRESSURIZATION APPARATUS OF IMPROVED INSULATION PERFORMANCE |
摘要 |
A pressurized heat treatment apparatus according to the present invention comprises: a chamber housing member constituting the exterior thereof; an interior housing member for sectioning an internal space off inside the chamber housing member; a work stacking unit which is located in the interior housing member; a door member which opens or closes the chamber housing member; a cooling unit which is located inside the housing member and adjusts the internal temperature of the chamber housing member; a heating unit for supplying heat to the internal space of the chamber housing member; and a pressure adjustment unit for adjusting the internal pressure of the chamber housing, wherein an insulation member is installed inside the chamber housing member to come into contact with the chamber housing member. By the present invention, the internal temperature of a pressurized heat treatment apparatus can be rapidly increased. Also, a pressured heat treatment apparatus with secured insulation can be compactly configured. |
申请公布号 |
KR20140017025(A) |
申请公布日期 |
2014.02.11 |
申请号 |
KR20120067229 |
申请日期 |
2012.06.22 |
申请人 |
YEST CO., LTD. |
发明人 |
SHU, MIN SUKE;BAIK, TAE HYUN;RYU, CHEOL HEE;YANG, JE SUN;KIM, JEONG EUI |
分类号 |
H01L21/324;H01L21/02;H05K3/00 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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