发明名称 Thermal detector, thermal detection device, electronic instrument, and thermal detector manufacturing method
摘要 A thermal detector includes a substrate; a support member supported on the substrate with a cavity interposed therebetween; a heat-detecting element formed on the support member; a first light-absorbing layer formed on the heat-detecting element and the support member so as to be in contact with the heat-detecting element; and a second light-absorbing layer formed on the first light-absorbing layer so as to be in contact with the first light-absorbing layer. The second light-absorbing layer has a higher refractive index than the first light-absorbing layer. A first wavelength resonates between a surface of the support member and an upper surface of the second light-absorbing layer, and a second wavelength, which is different from the first wavelength, resonates between an interface, at which the first light-absorbing layer and the second light-absorbing layer are in contact with each other, and the upper surface of the second light-absorbing layer.
申请公布号 US8648302(B2) 申请公布日期 2014.02.11
申请号 US201113329518 申请日期 2011.12.19
申请人 TSUCHIYA YASUSHI;SEIKO EPSON CORPORATION 发明人 TSUCHIYA YASUSHI
分类号 G01J5/00 主分类号 G01J5/00
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