发明名称 Controlled localized defect paths for resistive memories
摘要 Controlled localized defect paths for resistive memories are described, including a method for forming controlled localized defect paths including forming a first electrode forming a metal oxide layer on the first electrode, masking the metal oxide to create exposed regions and concealed regions of a surface of the metal oxide, and altering the exposed regions of the metal oxide to create localized defect paths beneath the exposed regions.
申请公布号 US8648418(B2) 申请公布日期 2014.02.11
申请号 US201313834741 申请日期 2013.03.15
申请人 INTERMOLECULAR, INC. 发明人 MILLER MICHAEL;CHIANG TONY P.;PHATAK PRASHANT B.
分类号 H01L27/01 主分类号 H01L27/01
代理机构 代理人
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