发明名称 Semiconductor structures including bodies of semiconductor material, devices including such structures and related methods
摘要 Semiconductor structures that include bodies of a semiconductor material spaced apart from an underlying substrate. The bodies may be physically separated from the substrate by at least one of a dielectric material, an open volume and a conductive material. The bodies may be electrically coupled by one or more conductive structures, which may be used as an interconnect structure to electrically couple components of memory devices. By providing isolation between the bodies, the semiconductor structure provides the properties of a conventional SOI substrate (e.g., high speed, low power, increased device density and isolation) while substantially reducing fabrication acts and costs associated with such SOI substrates. Additionally, the semiconductor structures of the present disclosure provide reduced parasitic coupling and current leakage due to the isolation of the bodies by the intervening dielectric material.
申请公布号 US8648414(B2) 申请公布日期 2014.02.11
申请号 US201113175507 申请日期 2011.07.01
申请人 TANG SANH D.;WELLS DAVID H.;ALLEN TUMAN E.;MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.;WELLS DAVID H.;ALLEN TUMAN E.
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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