发明名称 FinFET semiconductor device with germanium (GE) fins
摘要 The present disclosure provides a FinFET element. The FinFET element includes a germanium-FinFET element (e.g., a multi-gate device including a Ge-fin). In one embodiment, device includes a fin having a first portion including Ge and a second portion, underlying the first portion and including an insulating material (e.g., silicon dioxide). A gate structure may be formed on the fin.
申请公布号 US8648400(B2) 申请公布日期 2014.02.11
申请号 US201113247507 申请日期 2011.09.28
申请人 XU JEFF J.;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 XU JEFF J.
分类号 H01L29/78 主分类号 H01L29/78
代理机构 代理人
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