发明名称 |
Process for cleaning semiconductor devices and/or tooling during manufacturing thereof |
摘要 |
Cleaning processes for cleaning semiconductor devices or semiconductor tooling during manufacture thereof generally include contacting the semiconductor devices or semiconductor tooling with an antioxidant to form an insoluble adduct followed by solubilizing the adduct with a basic aqueous cleaning solution. |
申请公布号 |
US8647445(B1) |
申请公布日期 |
2014.02.11 |
申请号 |
US201213669651 |
申请日期 |
2012.11.06 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHHABRA VISHAL;FITZSIMMONS JOHN A.;KHOJASTEH MAHMOUD;MUNCY JENNIFER |
分类号 |
B08B3/04 |
主分类号 |
B08B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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