发明名称 Growth method of metal nanostructure
摘要 The present invention relates to a method for making metal nanostructure self-grow vertically with an electrochemical method. An embodiment of the growth method of the present invention comprises; a step of adding a growth solution including metal cyanide and a pH-regulator to a substrate in which a patterned electrode is formed; and a step of growing a metal nanostructure by applying voltage. As an electrochemical condition of the present invention, the pH of the growth solution is in a range of 8 to 11. Also, an equilibrium potential and a negative voltage in which a potential difference is 1V or more can be applied. An electrochemical growth method of a metal nanostructure according to the present invention is a simple method which does not require a template and an additional process, thus minimizing process costs and reducing process time.
申请公布号 KR101359878(B1) 申请公布日期 2014.02.11
申请号 KR20120078723 申请日期 2012.07.19
申请人 发明人
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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