| 摘要 |
The present invention relates to a method for recycling an electrode of a chemical vapour deposition (CVD) chamber and the electrode of the CVD chamber, and comprises a step for firstly cutting and processing the surface of a fixing unit; a step for plating the surface of the fixing unit with copper; a step for secondly cutting and processing the surface of the fixing unit at a predetermined size; and a step for plating the surface of the fixing unit with silver. The present invention is provided to reduce costs by preventing the disposal for the electrode through recycling the fixing unit even through the fixing unit, which fixes a graphite electrode is fixed in the electrode of the CVD chamber, is damaged. The present invention minimizes the cost and effort required for recycling the fixing unit; provides excellent quality, and improves the reliability of the recycled electrode. [Reference numerals] (110) Battery unit;(115) Sensing module;(122) Power conversion module;(124) Battery protection module;(132) Driving module;(141) First control module;(143) Second control module;(145) Third control module;(147) Fourth control module;(149) Fifth control module;(AA) External power;(BB,CC) Main control unit |
