发明名称 |
Chemical coating of microwell for electrochemical detection device |
摘要 |
The described embodiments may provide a method of fabricating a chemical detection device. The method may comprise forming a microwell above a CMOS device. The microwell may comprise a bottom surface and sidewalls. The method may further comprise applying a first chemical to be selectively attached to the bottom surface of the microwell, forming a metal oxide layer on the sidewalls of the microwell, and applying a second chemical to be selectively attached to the sidewalls of the microwell. The second chemical may lack an affinity to the first chemical. |
申请公布号 |
US8647577(B2) |
申请公布日期 |
2014.02.11 |
申请号 |
US201213648663 |
申请日期 |
2012.10.10 |
申请人 |
LIFE TECHNOLOGIES CORPORATION |
发明人 |
HINZ WOLFGANG;MAURO JOHN MATTHEW;LI SHIFENG;BUSTILLO JAMES |
分类号 |
G01N27/00;B05D5/12;B28B19/00;B29B15/10;C23C18/00;C23C20/00;C23C24/00;C23C26/00;C23C28/00;C23C30/00;G01N27/30;G01N30/96;H01C17/06;H01L21/00;H05K3/00 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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