发明名称 OPTICAL ENGINE FOR DIGITAL EXPOSURE APPARATUS
摘要 PURPOSE: An optical engine for a digital exposure device is provided to amplify the effect of a light source by combining an isosceles tetrahedron and an isosceles reversed tetrahedron with a digital micro mirror part. CONSTITUTION: An optical engine(100) for a digital exposure device includes a first prism part(120), digital micro mirror parts(130), a second prism part(140), and a projection lens part(150). The first prism part reflects parallel rays(101) radiated to the three sides of an isosceles tetrahedron to generate reflected rays(102, 103, 104). The digital micro mirror parts are respectively installed to face the three sides of the isosceles tetrahedron. The digital micro mirror parts receive the reflected rays and adjust the intensity of the reflected rays with predetermined angles. The digital mirror parts reflect the reflected rays with the adjusted intensity. The second prism part includes an isosceles reversed tetrahedron correspondingly at the lower side of the isosceles tetrahedron. The second prism part receives reflected rays from the digital micro mirror parts and vertically reflects the reflected rays to an exposure substrate(160). The projection lens part projects the rays from the second prism part to the substrate.
申请公布号 KR101359495(B1) 申请公布日期 2014.02.11
申请号 KR20110012749 申请日期 2011.02.14
申请人 发明人
分类号 G02B3/00;G02B5/04;G03F7/20 主分类号 G02B3/00
代理机构 代理人
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