| 摘要 |
The task of the present invention is to provide a microwave irradiation apparatus capable of performing mass production stability and high reproducibility of a process. The microwave irradiation apparatus of the present invention comprises: a processing container (1) for accommodating a substrate (W); a support member (23) for supporting the substrate (W) inside the processing container (1); a microwave introduction apparatus (3) for introducing microwaves inside the processing container (1) by generating the microwaves; a microwave introduction port (10) for introducing the microwaves generated in the microwave introduction apparatus (3) into the processing container (1); an electric field sensor (85) for measuring an electric field formed by the microwaves introduced inside the processing container (1); and a control unit (9) for controlling the power of the microwaves introduced in the processing container (1) through the microwave introduction port (10) from the microwave introduction apparatus (3) based on the electric field measured in the electric field sensor (85). [Reference numerals] (24) Rotation driving part; (25) Elevation driving part; (31) Magnetron; (34) Circulator; (35) Detector; (36) Tuner; (37) Dummy load; (40) High voltage power part; (54) Gas supply device; (72) Exhaustion device; (84) Temperature measuring part; (86) Electric field measuring part; (9) Control part |
