ARRAY TYPE PLASMA GENERATOR

摘要

The present invention relates to an array type plasma generator. The array type plasma generator according to the present invention includes: a plasma array which is arranged to have a sequential arrangement structure of multiple plasma generating units which are respectively equipped with at least one plasma electric discharge unit inducing a plasma electric discharge by electromagnetic energy, a dielectric resonator inducing the electromagnetic energy to the plasma electric discharge unit, and a tube installed to penetrate the plasma electric discharge unit or be connected with the plasma electric discharge unit; multiple drive probes which are respectively installed in each of the multiple plasma generating units and are installed for the input of the electromagnetic energy; at least one feedback probe which is installed in a plasma generating unit which is selected among the multiple plasma generating units and is installed for the output or feedback of the electromagnetic energy; and a divider which divides the electromagnetic energy outputted through at least one feedback probe into the number of the multiple drive probes and applies the divided electromagnetic energy in the multiple drive probes respectively. The present invention is able to improve the generation efficiency of plasma by more efficiently inducing a plasma electric discharge by efficiently delivering electromagnetic energy to the plasma electric discharge unit by a dielectric body. The present invention is also able to process and use plasma for a large area. [Reference numerals] (50) Divider