发明名称 |
SYSTEM AND METHOD FOR GENERATING PHYSICAL DETERMINISTIC BOUNDARY INTERCONNECT FEATURES FOR DUAL PATTERNING TECHNOLOGIES |
摘要 |
One aspect is to provide a system for generating a layout for dual patterning technologies. According to one embodiment, the system includes (1) a deterministic boundary interconnect feature generator for generating a deterministic boundary interconnect feature on a cell based on at least one dual patterning design rule; and (2) a cell arrangement and interconnect routing tools arranged in other features of the cell deterministic with regard to the boundary interconnect feature, and related to the deterministic boundary interconnect feature. |
申请公布号 |
KR20140017438(A) |
申请公布日期 |
2014.02.11 |
申请号 |
KR20130090215 |
申请日期 |
2013.07.30 |
申请人 |
LSI CORPORATION |
发明人 |
MILINICHIK JOHN A.;DELPERO DANIEL J.;BERTINO SCOTT N.;SMOOHA YEHUDA;HARLEMAN GREGG R. |
分类号 |
H01L21/00;H01L21/027;H01L21/768 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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