发明名称 SYSTEM AND METHOD FOR GENERATING PHYSICAL DETERMINISTIC BOUNDARY INTERCONNECT FEATURES FOR DUAL PATTERNING TECHNOLOGIES
摘要 One aspect is to provide a system for generating a layout for dual patterning technologies. According to one embodiment, the system includes (1) a deterministic boundary interconnect feature generator for generating a deterministic boundary interconnect feature on a cell based on at least one dual patterning design rule; and (2) a cell arrangement and interconnect routing tools arranged in other features of the cell deterministic with regard to the boundary interconnect feature, and related to the deterministic boundary interconnect feature.
申请公布号 KR20140017438(A) 申请公布日期 2014.02.11
申请号 KR20130090215 申请日期 2013.07.30
申请人 LSI CORPORATION 发明人 MILINICHIK JOHN A.;DELPERO DANIEL J.;BERTINO SCOTT N.;SMOOHA YEHUDA;HARLEMAN GREGG R.
分类号 H01L21/00;H01L21/027;H01L21/768 主分类号 H01L21/00
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